More precision

Two sensors combined in one housing for thickness measurement


• Simple film thickness measurement solution
•  Insulator on metal layer thickness measurement
•  Integrated temperature compensation for extreme stable measurements
•  Thickness measurement in one axis eliminates alignment errors of two separate sensors
•  Non-contact measurement gives wear-free and maintenance-free usage
•  Resolution to 0.05μm
•  Linearity of ±2.5μm
•  Temperature Stability ±50ppm/°C
•  No radiation and therefore simple and safe to install
back to product group "Capacitive sensors / OEM"
Micro-Epsilon UK Ltd
No.1 Shorelines Building Shore Road Birkenhead CH41 1AU mobile phone icon
+44 151 355 6070 phone icon
+44 151 355 6075 fax icon