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Capacitive displacement sensors at a glance

Capacitive displacement sensors from Micro-Epsilon are available in different designs and versions. The sensors are differentiated by their measuring range, their design and by the technology used to manufacture them. The capacitive sensors are available in a cylindrical design (with integrated cable or socket) or as flat sensors (with integrated cable). The displacement sensors can be exchanged without recalibration; the sensor replacement can be completed rapidly. The majority of sensors can be used in clean rooms; use in ultra high vacuums is also possible.

Click on the respective category to obtain further information about capacitive sensors.

Cylindrical sensors with female connector

Model	Measuring range	Min. ø Target	Dimension
CS005	0,05 mm	3 mm	Ø6 × 12 mm
CS02	0,2 mm	5 mm	Ø6 × 12 mm
CS05	0,5 mm	7 mm	Ø8 × 12 mm
CSE05	0,5 mm	6 mm	Ø6 × 12 mm
CS08	0,8 mm	9 mm	Ø10 × 15 mm
CS1	1 mm	9 mm	Ø10 × 21 mm
CS1HP	1 mm	9 mm	Ø10 × 20 mm
CSE1	1 mm	8 mm	Ø8 × 12 mm
CS2	2 mm	17 mm	Ø20 × 24 mm
CSE2	2 mm	14 mm	Ø14 × 24 mm
CS3	3 mm	27 mm	Ø30 × 24 mm
CS5	5 mm	37 mm	Ø40 × 24 mm
CS10	10 mm	57 mm	Ø60 × 24 mm

CS005 sensors can't be used with the controller capaNCDT6019 and capaNCDT6100.

CS = capa Sensor
-HP = High Precision

Detail

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CS005

Weight:	2 g
Resolution:	0,0375 nm *
Linearity:	±0,2 % F.S.O. *
Temperature stability sensitivity:	10 ppm/°C
Operation temperature max.:	+200 °C

* depends on controller unit

CS02

Weight:	2 g
Resolution:	0,15 nm *
Linearity:	±0,2 % F.S.O. *
Temperature stability sensitivity:	10 ppm/°C
Operation temperature max.:	+200 °C

* depends on controller unit

CS05

Weight:	4 g
Resolution:	0,375 nm *
Linearity:	±0,05 % F.S.O. *
Temperature stability sensitivity:	10 ppm/°C
Operation temperature max.:	+200 °C

* depends on controller unit

CSE05

Weight:	2 g
Resolution:	0,375 nm *
Linearity:	±0,05 % F.S.O. *
Temperature stability sensitivity:	10 ppm/°C
Operation temperature max.:	+200 °C

* depends on controller unit

CS08

Weight:	7 g
Resolution:	0,6 nm *
Linearity:	±0,05 % F.S.O. *
Temperature stability sensitivity:	10 ppm/°C
Operation temperature max.:	+200 °C

* depends on controller unit

CS1

Weight:	8 g
Resolution:	0,75 nm *
Linearity:	±0,05 % F.S.O. *
Temperature stability sensitivity:	32 ppm/°C
Operation temperature max.:	+200 °C

* depends on controller unit

CS1HP

Weight:	8 g
Resolution:	0,75 nm *
Linearity:	±0,05 % F.S.O. *
Temperature stability sensitivity:	10 ppm/°C
Operation temperature max.:	+200 °C

* depends on controller unit

CSE1

Weight:	3,5 g
Resolution:	0,75 nm *
Linearity:	±0,05 % F.S.O. *
Temperature stability sensitivity:	10 ppm/°C
Operation temperature max.:	+200 °C

* depends on controller unit

CS2

Weight:	50 g
Resolution:	1,5 nm *
Linearity:	±0,05 % F.S.O. *
Temperature stability sensitivity:	32 ppm/°C
Operation temperature max.:	+200 °C

* depends on controller unit

CSE2

Weight:	20 g
Resolution:	1,5 nm *
Linearity:	±0,05 % F.S.O. *
Temperature stability sensitivity:	32 ppm/°C
Operation temperature max.:	+200 °C

* depends on controller unit

CS3

Weight:	70 g
Resolution:	2,25 nm *
Linearity:	±0,05 % F.S.O. *
Temperature stability sensitivity:	32 ppm/°C
Operation temperature max.:	+200 °C

* depends on controller unit

CS5

Weight:	95 g
Resolution:	3,75 nm *
Linearity:	±0,05 % F.S.O. *
Temperature stability sensitivity:	32 ppm/°C
Operation temperature max.:	+200 °C

* depends on controller unit

CS10

Weight:	180 g
Resolution:	7,5 nm *
Linearity:	±0,05 % F.S.O. *
Temperature stability sensitivity:	32 ppm/°C
Operation temperature max.:	+200 °C

* depends on controller unit

Cylindrical sensors with integrated cable

Model	Measuring range	Min. ø Target	Dimension
CSH02-CAm1,4	0,2 mm	7 mm	Ø8 × 14 mm
CSH05-CAm1,4	0,5 mm	7 mm	Ø8 × 14 mm
CSH1-CAm1,4	1 mm	11 mm	Ø12 × 14 mm
CSH1,2-CAm1,4	1,2 mm	11 mm	Ø12 × 14 mm
CSH2-CAm1,4	2 mm	17 mm	Ø20 × 14 mm

Sensors with integrated cable can't be used with the controller capaNCDt6019.

CSH = capa Sensor Hybrid

Detail

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CSH02-CAm1,4

Weight:	30 g
Resolution:	0,15 nm *
Linearity:	±0,05 % F.S.O. *
Temperature stability sensitivity:	-12 ppm/°C
Operation temperature max.:	+200 °C
Cable length:	1,4 m

* depends on controller unit

CSH05-CAm1,4

Weight:	30 g
Resolution:	0,38 nm *
Linearity:	±0,05 % F.S.O. *
Temperature stability sensitivity:	-12 ppm/°C
Operation temperature max.:	+200 °C
Cable length:	1,4 m

* depends on controller unit

CSH1-CAm1,4

Weight:	33 g
Resolution:	0,75 nm *
Linearity:	±0,05 % F.S.O. *
Temperature stability sensitivity:	-12 ppm/°C
Operation temperature max.:	+200 °C
Cable length:	1,4 m

* depends on controller unit

CSH1,2-CAm1,4

Weight:	33 g
Resolution:	0,9 nm *
Linearity:	±0,05 % F.S.O. *
Temperature stability sensitivity:	-12 ppm/°C
Operation temperature max.:	+200 °C
Cable length:	1,4 m

* depends on controller unit

CSH2-CAm1,4

Weight:	38 g
Resolution:	1,5 nm *
Linearity:	±0,05 % F.S.O. *
Temperature stability sensitivity:	-12 ppm/°C
Operation temperature max.:	+200 °C
Cable length:	1,4 m

* depends on controller unit

Flat sensors with integrated cable

Model	Measuring range	Min. ø Target	Dimension
CSH02FL-CRm1,4	0,2 mm	7 mm	10,5 × 8 × 4 mm
CSH05FL-CRm1,4	0,5 mm	7 mm	10,5 × 8 × 4 mm
CSH1FL-CRm1,4	1 mm	11 mm	17 × 12 × 4 mm
CSH1,2FL-CRm1,4	1,2 mm	11 mm	17 × 12 × 4 mm
CSH2FL-CRm1,4	2 mm	17 mm	20 × 20 × 5 mm

Sensors with integrated cable can't be used with the controller capaNCDT 6019.

CSH = capa Sensor Hybrid
-FL = Flat Design

Detail

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CSH02FL-CRm1,4

Weight:	28 g
Resolution:	0,15 nm *
Linearity:	±0,05 % F.S.O. *
Temperature stability sensitivity:	-12 ppm/°C
Operation temperature max.:	+200 °C
Cable length:	1,4 m

* depends on controller unit

CSH05FL-CRm1,4

Weight:	28 g
Resolution:	0,38 nm *
Linearity:	±0,05 % F.S.O. *
Temperature stability sensitivity:	-12 ppm/°C
Operation temperature max.:	+200 °C
Cable length:	1,4 m

* depends on controller unit

CSH1FL-CRm1,4

Weight:	30 g
Resolution:	0,75 nm *
Linearity:	±0,05 % F.S.O. *
Temperature stability sensitivity:	-12 ppm/°C
Operation temperature max.:	+200 °C
Cable length:	1,4 m

* depends on controller unit

CSH1,2FL-CRm1,4

Weight:	30 g
Resolution:	0,9 nm *
Linearity:	±0,05 % F.S.O. *
Temperature stability sensitivity:	-12 ppm/°C
Operation temperature max.:	+200 °C
Cable length:	1,4 m

* depends on controller unit

CSH2FL-CRm1,4

Weight:	36 g
Resolution:	1,5 nm *
Linearity:	±0,05 % F.S.O. *
Temperature stability sensitivity:	-12 ppm/°C
Operation temperature max.:	+200 °C
Cable length:	1,4 m