Capacitive displacement, distance and position sensors
FSO = of full scale output
Capacitive sensor systems from Micro-Epsilon provide a modular, expandable and cost effective measurement system for position, distance, gap, thickness or closed loop control in the nanometre, micrometre and mm range.
From single channel, low cost OEM capacitive sensors such as the capaNCDT 6110 series, to high performance modular capaNCDT 6200 series and up to the ultra-precision capaNCDT 6500 series; Micro-Epsilon has a simple and flexible solution for capacitive measurement, designed for R&D, test, OEM and production environments, where either flexibility to expand the measurement system and/or high precision measurement is key.
All sensors can be combined with any electronic controllers to create a measurement system. Select the preferred sensor head for your application and then choose the electronics based upon your technical requirements.
Highest precision with innovative technology
The Micro-Epsilon capacitive system design includes an integrated sensor guard ring, triaxial signal cable and innovative controller technology. The perfectly coordinated measurement system reaches highest precision and signal stability reproducible even in industrial applications.
Sensors for customer specific applications and OEM
We can adapt our measurement system to customer-specific requirements. For example, custom sensor designs for difficult environments, specific target calibration, modified cable lengths and measuring ranges or sensors with integrated controllers. Click here
to read more on OEM sensor designs.
Sensor and controller exchange without re-calibration
capaNCDT sensors and controllers can be exchanged quickly and easily. No need for calibration when sensors or controllers are replaced, just plug the new sensor into the existing controller and measurements are recorded instantly.
Simple configuration and interface options
The modern capaNCDT controllers are equipped with different interfaces such as Analogue, Ethernet and EtherCAT. An inbuilt web browser is used via Ethernet connection to setup and configure the controllers. Features such as, multi point linearisation for non-ideal targets, arithmetic functions and data capture are included as standard.
Advantages of capaNCDT sensors
• Resolution from 0.0375nm
• Linearity from 0.1μm
• Repeatability from 0.0003 % FSO
• Temperature range -270°C to +270°C as standard, (higher temperatures on request)
• Long-term stability ±0.002 % FSO / month
• 25 sensors from stock with measuring ranges from 0.05mm to 10mm