Geometry inspection system for silicon ingots
The “dimensionCONTROL 8260 for Ingot” measuring system inspects the surface of the bricks using several laser line scanners and in doing so measures the side lengths, phase lengths, angles, diagonal surfaces and the planarity of the side surfaces completely automatically. The system calibrates itself automatically to the inserted brick size. Differences from the target geometry are reliably detected and can be marked. In contrast to a manual inspection, the results can be reproduced very well.
• Ingot lengths up to 2500 mm
• Virtual reconstruction of the surface
• Can be fitted with integrated load cell
• Automatic or manual marking of the defective places
• Increase of the ingot yield
back to product group "Semiconductor measurement"