More precision
 

Wafer edge inspection

Features

• Reliable defect detection
•  2 – 5 mm of the wafer edge
•  high resolution image processing system
•  Finds particles, cracks, scratches, point-shaped and flat defects, etching defects, crystal growth, contamination and geometry deviations
back to product group "Semiconductor measurement"
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MICRO-EPSILON
UK & Ireland Ltd.

+44 151 355 6070
+44 151 355 6075
info@micro-epsilon.co.uk
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Micro-Epsilon UK Ltd
No.1 Shorelines Building Shore Road Birkenhead CH41 1AU
info@micro-epsilon.co.uk mobile phone icon
+44 151 355 6070 phone icon
+44 151 355 6075 fax icon