High-precision thickness measurement of electrically conductive films
The capacitive TFG6220 system measures the thickness of electrically conductive films, e.g. battery films, with maximum precision. A vacuum device sucks in the object to be measured, smooths it and thus ensures that is optimally positioned without wrinkles. In this way, the measurement can be performed with the greatest possible precision. The system is used for offline random samples in quality inspection. Last but not least, the TFG6220 is pre-assembled ready for operation and enables a quick start.
Characteristics
- Fast offline inspection of the film thickness
- Resolution: 10 nm
- High repeatability: 1 µm
- Possible film thickness: < 1 mm
- Automatic smoothing of the film with vacuum ensures highly precise results
- Integrated measuring insert for simple referencing before thickness measurement
- Easy operation/visualization via the freely accessible sensorTOOL software
Precise testing for reliable quality
The TFG6220 consists of a measuring bracket including sensors and a capaNCDT controller. It calculates the thickness by evaluating the readings of the two capacitive sensors. An external vacuum device automatically smooths the measuring object. This is how micron-precise results are achieved.
The permanently installed capacitive sensor (1) on the top measures the distance from the measuring object (2). The measuring insert (3) acts as a referencing surface via which the object to be measured is sucked in and stretched across by means of a vacuum. The capacitive sensor on the bottom (4) measures onto the measuring insert and compensates for the mechanical offset of the contact surface.