Positioning of masks in lithography

Lithography processes require high resolution and long-term measurement of machine movements in order to achieve maximum precision. High resolutions enable nanometer-precise positioning of masks using capacitive sensors from Micro-Epsilon. Their vacuum-suitable design enables the sensors and cables to be used in ultra-high vacuum.

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capaNCDT 6200

MICRO-EPSILON UK & Ireland Ltd.
No.1 Shorelines Building
Shore Road
Birkenhead
CH41 1AU
(for Sat Nav use CH41 1AW)
info@micro-epsilon.co.uk
+44 151 355 6070
+44 151 355 6075