High precision displacement and thickness measurements


Largest sensor portfolio worldwide


Ideal for precise measurements


Vacuum compatible sensors

Confocal displacement, distance, position and thickness sensors

The confocal measurement principle is designed for high accuracy, non contact displacement distance and position measurement against any surface: solid, transparent, polished mirrored surfaces, low reflective matt surfaces and even liquids. If a surface is transparent, a one sided thickness measurement can be achieved with inbuilt correction for the material refractive index.

Quite often confocal sensors are selected when laser triangulation or other optical sensors are not accurate or stable enough on the surface being measured. In addition, confocal sensors have an extremely small spot diameter, typically a few microns and measure in the vertical plane, so do not suffer from shadowing of the reflected light. This also enables measurement into small bores and holes.

Almost all industries benefit from this measurement principle as it can be used in both R&D and in-process measurements. In particular, the semiconductor, micro lens, automotive part, medical, glass, and MEMS industries use this sensor technology in many ways. 



  1. Excellent signal-to-noise ratio
  2. Industrial-grade controller
  3. Extremely small and constant spot size
  4. Almost surface-independent, also valid for mirrored and glass surfaces
  5. Nanometre resolution
  6. One-sided thickness measurement
  7. Passive measuring system
  8. Robust design
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High precision displacement and distance measurement on practically all types of surfaces

The confocal chromatic measuring principle enables high precision displacement and distance measurements – on both diffuse and mirrored surfaces. Very small objects can be detected due to the small measurement spot size. Due to the axial beam path there are no shadowing effects. With the 90° version, geometrical features can be measured inside holes and recesses.

Adjustable mounting adapter for sensor alignment

To achieve maximum accuracy, the confocal sensors must be aligned as perpendicular as possible to the measuring object. The adjustable mounting adapter is used to optimally align all confocalDT sensors to the target. You can also align the sensor after the installation in the machine. The industrial adapter allows the displacement in the x- and y-axes as well as tilting the sensor to the measuring object.

New: Adjustable mounting adapter for two-sided thickness measurement

The JMA-Thickness consists of two adjustable mounting adapters, and supports the alignment of sensors in two-sided thickness measurements. This means that the measuring points can be arranged absolutely congruent on an optical axis, which ensures reliable thickness measurements with highest precision. The JMA-Thickness is ideal for the integration into machines and production plants. The preassembled mounting plates allow quick and easy installation.

One-sided thickness measurement of transparent materials

The confocal chromatic measuring principle enables thickness measurements of transparent materials such as glass. The thickness value is detected to micrometre accuracy using only a single sensor. The controller provides an editable, expandable materials database. Material-specific parameters such as refractive indexes can be adapted using the web interface. Multi-peak measurements enable the evaluation of up to 6 peaks, which is how multi-layer objects such as laminated glass can be measured.


Vacuum applications

The confocalDT sensors consist of passive components and do not give off heat. Particularly for use in vacuum applications, Micro-Epsilon offers sensors, cables and accessories which are suitable for the respective specification (clean room, vacuum ultra-high vacuum UHV). Vacuum compatible sensors are currently available with measuring ranges of 2.5 mm, 3 mm, 10 mm and 28 mm. The IFS2406-2,5 sensor is available with either axial or radial beam path.

High measuring rate for dynamic measurement tasks

With high measuring rates, it is important to adapt the exposure to the respective surface. Therefore, the confocalDT controller dynamically regulates the exposure of the CCD line. This exposure control compensates for colour and reflectivity changes of the measuring object in order to increase the measurement accuracy at high measuring rates.

Ultra-small light spot detects finest details and structures

Confocal sensors from Micro-Epsilon generate the smallest of light spots <3 µm due to their high Numerical aperture (NA). Therefore, the finest details and structures can be detected reliably.

Call 0151 355 6070 or email Micro Epsilon to help select the right product for your application.


Extremely large tilt angle

The confocalDT IFS sensors tolerate a large tilt angle up to 48°. Therefore curved and structured surfaces can be detected reliably to generate stable signals.

Call 0151 355 6070 or email Micro Epsilon to help select the right product for your application.

Controllers with high resolutions and high speeds

The confocal DT controllers provide an excellent signal-to-noise ratio enabling measurements at high accuracy and have been designed for industrial environments. The fast surface compensation regulates the exposure cycles in order to achieve high signal stability which is particularly for high speed scanning of surfaces with varying reflection characteristics. Interfaces are RS422, Ethernet, EtherCAT or Analogue Output.

Ease of use via web interface

Due to a user-friendly web interface, the entire configuration process is carried out without using any additional software. The web interface can be accessed via Ethernet and provides set up and configuration options. Materials are stored in an expandable materials database.

Multiple interfaces for easy integration