interferoMETER IMS5400-DS

Absolute distance measurements with maximum precision

interferoMETER IMS5400-TH

High precision thickness measurements of thinnest glass and films

interferoMETER IMS5600-DS

Absolute distance measurements with subnanometre resolution

High-precision white light interferometers for non-contact distance and thickness measurements

The innovative white light interferometers from Micro-Epsilon set a benchmark in high-precision distance and thickness measurements. These sensors enable stable measurement results with sub-nanometre resolution offering a comparatively large measuring range and offset distance. The interferometers are available in 4 series: the IMS5400-DS for high-precision industrial distance measurements, the IMS5400-TH for accurate thickness measurements and the vacuum-suitable IMS5600-DS for distance measurements with picometre resolution. The IMS5420-TH is used for wafer thickness measurement.



  1. Absolute distance measurement with nanometre accuracy
  2. Precise thickness measurements independent of the distance from the sensor
  3. Multi-peak distance measurement and multi-layer thickness measurement
  4. Unmatched precision for industrial applications
  5. Best-in-Class: Resolution 30 picometers (IMS5600)
  6. High signal stability due to new evaluation algorithms and active temperature compensation
  7. Large offset distance
  8. Simple parameter set up via web interface
  9. Industry optimized sensors with robust metal housing and flexible cables
  10. Sensors and cables suitable for vacuum
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Interferometer for industry and automation

The industrial white light interferometer consists of a robust sensor, a highly flexible sensor cable and a controller in an aluminium housing that can be mounted on a DIN rail. The controller has an active temperature control, which compensates for changes in the ambient temperature and thus achieves an enormous temperature stability. Thanks to its robust design, the interferometer can also be integrated in industrial environments. Cable lengths up to 10 m also allow a spatial separation of sensor and controller. For measurement tasks in clean rooms and in vacuum, vacuum-suitable sensors, cables and cable feed-through accessories are available.


Extreme z resolution and small light spot enable measurements of smallest of details and structures

The interferometer sensors enable a sub-nanometre resolution. In addition, they generate a 10 µm light spot over the entire measuring range. This allows the measurement of small details such as structures on semiconductors and miniaturized electronic components. The light spot is visualized by a pilot laser and facilitates the alignment of the sensor.

New sensor models with different designs

New sensors with different designs and properties are available for the integration in demanding environments. Due to their 90° beam path, both the IMP-DS0.5/90/VAC and the IMP-DS10/90/VAC can also be mounted in low installation spaces. The new IMP-DS1/VAC miniature sensor is one of the smallest optical sensors from Micro-Epsilon. With a diameter of 4 mm and an integrated cable, the sensor can also be used in extremely confined installation spaces. Sensors and cables can be used both in the clean room and in a vacuum.

Patented pilot laser for easy sensor positioning

White light interferometers use infrared light in the non-visible range (approx. 840 nm wavelength), which means that the measurement position cannot be seen. To visualize the measuring position, Micro-Epsilon systems are equipped with a pilot laser which projects a light spot onto the measuring position. In addition, the pilot laser uses a patented method to provide feedback on the distance in addition to the measurement position. If the measuring object is at the correct distance and within the measuring range, a constant glow is emitted by the pilot laser. If the measuring object is outside the measuring range, the pilot laser flashes.

Adjustable mounting adapter for sensor alignment

To achieve maximum accuracy, the interferometers must be aligned as perpendicular as possible to the target. With the adjustable mounting adapter, the sensors can be optimally aligned to the measuring object. You can also align the sensor after the installation in the machine. The industrial adapter allows the displacement in the x- and y-axes as well as tilting the sensor to the measuring object.

New: Adjustable mounting adapter for two-sided thickness measurement

The JMA-Thickness consists of two adjustable mounting adapters, and supports the alignment of sensors in two-sided thickness measurements. This means that the measuring points can be arranged absolutely congruent on an optical axis, which ensures reliable thickness measurements with highest precision. The JMA-Thickness is ideal for the integration into machines and production plants. The preassembled mounting plates allow quick and easy installation.

Ease of use via web interface

Due to a user-friendly web interface, no additional software is necessary to configure the controller and the sensors. The web interface is accessible via Ethernet connection and enables quick and easy setting of, e.g., averaging, measuring rate and presets.

Modern interfaces for integration into machines and systems

The controller offers integrated interfaces such as Ethernet, EtherCAT and RS422 as well as additional encoder connections, analogue outputs, synchronization inputs and digital I/Os. When you use Micro-Epsilon's interface modules, PROFINET and EthernetIP are available. This allows the interferometer to be integrated into all control systems and production programs.