Confocal sensors for distance & thickness measurements with special requirements
The confocal IFS2406 series of sensors are designed to offer high performance measurement yet with compact sensor geometry. The performance of the IFS2406 series is almost as high as the market leading IFS2405 series sensors, yet has a much more compact footprint.
As well as high accuracy distance measurements on reflecting or transparent surfaces, the sensor can also be applied in one-sided thickness measurement of transparent film, plates or layers. Due to its axial and radial measuring directions, the IFS2406 sensors have more flexibility in how they can be mounted. The sensors are also are suitable for vacuum applications which enables many applications in semiconductor and micro-electronics production.
confocalDT IFS2406
- Measuring ranges (mm): 2.5 | 3 | 10
- Linearity max. 0.75 µm
- Resolution max. 0.024 µm
- Distance and one-sided thickness measurements
- Small light spot
- Vacuum compatible sensor
confocalDT IFS2406-3/VAC(001)
- Measuring ranges (mm): 3
- Linearity max. 1.5 µm
- Resolution max. 0.05 µm
- Distance and one-sided thickness measurements
- Small light spot
- Vacuum compatible sensor
Related links
