White light interferometer for absolute distance measurement with nanometre accuracy
The new IMS5400-DS white light interferometer opens up new perspectives in industrial distance measurement. The controller has an intelligent evaluation feature and enables absolute measurements with nanometre accuracy at a relatively large offset distance. Compared to other absolute measuring optical systems, the IMS5400-DS offers an unsurpassed combination of accuracy, measuring range and offset distance.
- Nanometre-precise distance measurements
- Absolute measurement, suitable for step profiles
- Compact and robust sensors with large offset distance
- Measuring rate up to 6 kHz for high speed measurements
- Robust controller with passive cooling
- Easy configuration via web interface
Absolute distance measurement with nanometre resolution
The IMS5400-DS is used for high-precision displacement and distance measurements. Unlike conventional interferometers, the IMS5400-DS also enables stable measurement of step profiles. Thanks to the absolute measurement, the scanning of steps is performed with high signal stability and precision. When measuring on moving objects, the differences in height of heels, steps and depressions can thus be reliably detected.
Ideal for industrial environments
Robust sensors and a controller in a metal housing make the system ideally suitable for integration into production lines. The controller can be installed in the control cabinet via DIN rail mounting and provides very stable measurement results due to active temperature compensation and passive cooling. These compact sensors are extremely space-saving and can also be integrated in confined spaces. Highly flexible fibre optic cables are available in lengths up to 10 m and allow a spatial separation of sensor and controller. Commissioning and parameterisation are conveniently performed via web interface and do not require any software installation.
Small light spot for the smallest of details and structures
The sensors generate a small light spot over the entire measuring range. The light spot diameter is only 10 µm and allows the detection of small details such as structures on semiconductors and miniaturised electronic components.
Measuring multiple surfaces
The interferometric measuring method enables measurements on numerous surfaces. This allows high-precision distance measurements on reflecting metals, plastics and glass.
Modern interfaces for integration into machines and systems
The controller offers integrated interfaces such as Ethernet, EtherCAT and RS422 as well as additional encoder connections, analog outputs, synchronization inputs and digital I/Os. When you use Micro-Epsilon's interface modules, PROFINET is available. This allows the interferometer to be integrated into all control systems and production programs.