Jump directly to main navigation Jump directly to content Jump to sub navigation

Positioning the wafer stage

Non-contact sensors from Micro-Epsilon are used for position monitoring of the wafer stage, where they measure highly dynamic XYZ movements of the stage which accelerates very rapidly. Capacitive and inductive (eddy current) sensors achieve nanometre resolution in order to ensure that the wafer is precisely positioned for the exposure process. These innovative sensors can be used in vacuum applications and are insensitive to strong magnetic fields.