New white light interferometer offers nanometre-accurate measurements of transparent thin layers from just 1 µm thickness

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Precision sensor manufacturer Micro-Epsilon has further developed its interferoMETER range of white light interferometers to include a system designed for non-contact, high precision, high speed thickness measurement of thin transparent single layers and multi-layer coatings. This further expands the range of potential applications in the semiconductor, metal processing and packaging industries.

With a measuring rate up to 24 kHz, the new interferoMETER IMS5200-TH is designed for fast, high precision inline thickness measurements. It measures layer thicknesses from 1 μm to 100 μm with nanometre precision and with excellent linearity of < ± 100 nm. In addition, multi-peak measurement of up to five thin film layers is possible. The measurement rate can be adjusted from 100 Hz to 24 kHz. Areas of application of the IMS5200-TH are diverse and range from air gap measurement for glass wafers and masks, to testing the coating processes of beverage cartons, as well as paint thickness tests in the metal industry.

The interferoMETER IMS5200-TH sensor and controller are matched and factory-calibrated, enabling nanometre-accurate air gap and layer thickness measurements, even in clean room and vacuum environments. Due to the stored material database, the system offers maximum flexibility. It is not necessary to teach-in each material separately.

Easy installation and integration

White light interferometer mounted on stage measuring coating thickness
The new interferoMETER IMS5200-TH is designed for non-contact, high precision, high speed thickness measurement of thin transparent film.

Due to the compact and robust sensor design, combined with a large working range of ± 2 mm, and 26 mm stand-off, the sensor can be easily integrated into confined production lines. The controller is mounted in a control cabinet via a DIN rail.

For seamless integration into industrial networks, the system offers Ethernet, EtherCAT and RS422 connections, as well as advanced encoder connections, synchronisation inputs and digital I/Os. Due to these versatile interfaces, measured values can be efficiently processed via existing analogue outputs and integrated into existing control and automation systems.

With IP40 (controller) and IP65 (sensor) protection, the IMS5200-TH can be used in temperatures from +10°C to +50°C. Even with high shock or vibrations, the interferometer ensures consistently high measurement results. Compared to conventional interferometers, Micro-Epsilon white light interferometers are easy to commission and set up via a web interface and do not require any software installation.

A growing portfolio of precision

The interferometer IMS5200TH is the latest addition in the Micro-Epsilon range of high precision absolute interferometers. The innovative Micro-Epsilon interferometers for absolute measurements set a benchmark in high precision distance and thickness measurements. These sensors enable stable measurement results with sub-nanometre resolution, offering a comparatively large measuring range and offset distance.

Interferometers from Micro-Epsilon work differently than laser interferometers by using polychromatic white light. Their integrated light source uses an extended wavelength spectrum instead of a defined wavelength. This means that significantly more information is available for evaluating the superposition of received wavelengths.

For more information, please visit interferoMETER 5200-TH | Micro-Epsilon or call the Micro-Epsilon sales department on +44 (0)151 355 6070 or email info@~@micro-epsilon.co.uk

Further Information

Interferometer
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